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Author
Mescheder, Ulrich (2)
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Year of publication
1989 (2)
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Article (peer-reviewed) (2)
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German
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State of the art of pattern placement accuracy of silicon X-ray master masks
(1989)
Pongratz, S.
;
Mescheder, Ulrich
;
Ehrlich, Ch.
;
Huber, H.-L.
;
Kohlmann, K.
;
Windbracke, W.
Fabrication of 0.5 μm NMOS-devices by all level X-ray lithography
(1989)
Mackens, U.
;
Mescheder, Ulrich
;
Mund, F.
;
Lüthje, H.
;
Lifka, H.
;
Juffermans, C.A.H.
;
Woerlee, P.H.
;
Walker, A.J.
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2