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Author
Kötter, Christiane (5)
(remove)
Year of publication
1998
(4)
1999
(1)
Document type
Conference Proceeding
(2)
Article (peer-reviewed)
(1)
Other
(1)
Report
(1)
Language
English
(3)
German
(2)
Has full text
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(5)
Is part of the Bibliography
Yes
(5)
Keywords
Inch worm
(1)
Light-controlled etch rate
(1)
Optical monitoring of etch rate
(1)
Patent
(1)
Piezoelectric actuator
(1)
Piezoelectric stepping motor
(1)
Silicon micromachining
(1)
piezoelektrischer Schrittmotor
(1)
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Title
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Author
Piezoelectric inch worm motor with monolithically integrated driving block
(1998)
Mescheder, Ulrich
;
Kötter, Christiane
;
Katzenstein, B.
;
Lang, T.
Piezoelectric Inch Worm Motor with Monolithically Integrated Driving Block
(1998)
Mescheder, Ulrich
;
Kötter, Christiane
;
Katzenstein, B.
Optical monitoring and control of Si wet etching
(1998)
Mescheder, Ulrich
;
Kötter, Christiane
Optical monitoring and control of Si wet etching
(1999)
Mescheder, Ulrich
;
Kötter, Christiane
Verfahren und Vorrichtung zur photoinduzierten Kontrolle des anisotropen Ätzens von kristallinem Silizium
(1998)
Mescheder, Ulrich
;
Kötter, Christiane
1
to
5