Single and Multilayer Atomic Layer Deposition on and into Mesoporous Silicon Layers
| Author: | Andras KovacsORCiDGND, Dagmar Martin, Alexander FilbertGND, Volker BucherORCiDGND, Ulrich MeschederORCiDGND |
|---|---|
| DOI: | https://doi.org/10.1149/09802.0121ecst |
| ISSN: | 1938-6737 |
| Parent Title (English): | ECS Transactions |
| Document Type: | Article (peer-reviewed) |
| Language: | English |
| Year of Completion: | 2020 |
| Release Date: | 2020/10/15 |
| Volume: | 98.2020 |
| Issue: | 2 |
| First Page: | 121 |
| Last Page: | 130 |
| Licence (German): |  Urheberrechtlich geschützt |