TY - JOUR U1 - Wissenschaftlicher Artikel A1 - Kovacs, Andras A1 - Martin, Dagmar A1 - Filbert, Alexander A1 - Bucher, Volker A1 - Mescheder, Ulrich T1 - Single and Multilayer Atomic Layer Deposition on and into Mesoporous Silicon Layers JF - ECS Transactions Y1 - 2020 SN - 1938-6737 SS - 1938-6737 U6 - https://doi.org/10.1149/09802.0121ecst DO - https://doi.org/10.1149/09802.0121ecst VL - 98.2020 IS - 2 SP - 121 EP - 130 ER -