Reliability Investigations in Micromechanical Devices
| Author: | Ulrich MeschederORCiDGND, Wolfgang Kronast, N. Naychuk |
|---|---|
| ISBN: | 80-01-02576-4 |
| Parent Title (English): | Eurosensors XVI, The 16th European Conference on Solid-State Transducers, September 15-18, 2002 Prague, Czech Republic |
| Document Type: | Conference Proceeding |
| Language: | English |
| Year of Completion: | 2002 |
| Release Date: | 2018/02/01 |
| Page Number: | 2 |
| First Page: | 145 |
| Last Page: | 146 |
| Licence (German): |  Urheberrechtlich geschützt |