Reliability Investigations in Micromechanical Devices

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Author:Ulrich MeschederGND, Wolfgang Kronast, N. Naychuk
ISBN:80-01-02576-4
Parent Title (English):Eurosensors XVI, The 16th European Conference on Solid-State Transducers, September 15-18, 2002 Prague, Czech Republic
Document Type:Conference Proceeding
Language:English
Year of Completion:2002
Release Date:2018/02/01
Pagenumber:2
First Page:145
Last Page:146
Access Rights:Frei verf├╝gbar
Licence (German):License LogoEs gilt das UrhG