@inproceedings{MeschederKronastNaychuk2002,
  author    = {Ulrich Mescheder and Wolfgang Kronast and N. Naychuk},
  title     = {Reliability Investigations in Micromechanical Devices},
  series = {Eurosensors XVI, The 16th European Conference on Solid-State Transducers, September 15-18, 2002 Prague, Czech Republic},
  isbn      = {80-01-02576-4},
  pages     = {145 -- 146},
  year      = {2002},
  language  = {en}
}