Reliability investigations in micromechanical devices
| Author: | Ulrich MeschederORCiDGND, Wolfgang Kronast, N. Naychuk |
|---|---|
| DOI: | https://doi.org/10.1016/j.sna.2003.10.054 |
| ISSN: | 0924-4247 |
| Parent Title (English): | Sensors and Actuators A: Physical |
| Document Type: | Article (peer-reviewed) |
| Language: | English |
| Year of Completion: | 2004 |
| Release Date: | 2018/02/22 |
| Tag: | Fatigue and crack propagation in crystalline silicon; Lifetime; Reliability |
| Volume: | 110.2004 |
| Issue: | 1-3 |
| First Page: | 150 |
| Last Page: | 156 |
| Open-Access-Status: | Open Access |
| Licence (German): |  Urheberrechtlich geschützt |