TY - JOUR U1 - Wissenschaftlicher Artikel A1 - Mescheder, Ulrich A1 - Kronast, Wolfgang A1 - Naychuk, N. T1 - Reliability investigations in micromechanical devices JF - Sensors and Actuators A: Physical KW - Reliability KW - Fatigue and crack propagation in crystalline silicon KW - Lifetime Y1 - 2004 SN - 0924-4247 SS - 0924-4247 U6 - https://doi.org/10.1016/j.sna.2003.10.054 DO - https://doi.org/10.1016/j.sna.2003.10.054 VL - 110.2004 IS - 1-3 SP - 150 EP - 156 ER -