Silicon Electrochemical Etching for 3D Microforms with High Quality Surfaces

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Metadaten
Author:Alexey Ivanov, Ulrich MeschederGND
DOI:https://doi.org/10.4028/www.scientific.net/AMR.325.666
ISSN:1662-8985
Parent Title (English):Advanced Materials Research
Document Type:Article (peer-reviewed)
Language:English
Year of Completion:2011
Release Date:2018/01/30
Volume:325.2011
First Page:666
Last Page:671
Access Rights:Innerhalb der Hochschule
Licence (German):License LogoEs gilt das UrhG