Silicon Electrochemical Etching for 3D Microforms with High Quality Surfaces
| Author: | Alexey Ivanov, Ulrich MeschederORCiDGND |
|---|---|
| DOI: | https://doi.org/10.4028/www.scientific.net/AMR.325.666 |
| ISSN: | 1662-8985 |
| Parent Title (English): | Advanced Materials Research |
| Document Type: | Article (peer-reviewed) |
| Language: | English |
| Year of Completion: | 2011 |
| Release Date: | 2018/01/30 |
| Volume: | 325.2011 |
| First Page: | 666 |
| Last Page: | 671 |
| Open-Access-Status: | Closed Access |
| Licence (German): |  Urheberrechtlich geschützt |