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Thin Photonic Crystals for Optical Characterization of Ultrathin Hafnium Dioxide in Mesoporous Layers

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Author:Andras Kovacs, Ulrich MeschederORCiDGND
Parent Title (English):IEEE Sensors 2018, October 28 - 31, 2018, New Dehli, India, Conference Proceedings
Document Type:Conference Proceeding
Year of Completion:2018
Release Date:2019/02/07
Tag:ALD; Hafnium dioxide; Optical spectroscopy; Photonic crystal; Porous silicon; Ultrathin
Open Access:Innerhalb der Hochschule
Licence (German):License LogoEs gilt das UrhG