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Optimization of platinum adhesion in electrochemical etching process for multi-sensor systems

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Author:Jutaphorn Kritwattanakhorn, Marie-Luise Bauersfeld, Andras Kovacs, Bernhard Müller, Ulrich MeschederORCiDGND, Sven Rademacher, Jürgen Wöllenstein
DOI:https://doi.org/10.1016/j.snb.2007.07.024
ISSN:0925-4005
Parent Title (English):Sensors and Actuators B: Chemical
Document Type:Article (peer-reviewed)
Language:English
Year of Completion:2007
Release Date:2018/02/20
Tag:Adhesion and diffusion barrier; Electrochemical etching process; Multifunctional sensor systems; Platinum; Porous silicon
Volume:127.2007
Issue:1
First Page:126
Last Page:131
Open Access:Innerhalb der Hochschule
Licence (German):License LogoEs gilt das UrhG