Miniaturized porous silicon rugate filter wheel for multispectral imaging applications
Author: | Shervin KeshavarziORCiDGND, Andras KovacsORCiDGND, Mohammad Abdo, Vlad Badilita, Jan G. Korvink, Ulrich MeschederORCiDGND |
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URL: | https://ieeexplore.ieee.org/document/9012789 |
ISBN: | 978-3-8007-5090-0 |
Parent Title (German): | MikroSystemTechnik Kongress 2019 : Mikroelektronik | MEMS-MOEMS | Systemintegration – Säulen der Digitalisierung und künstlichen Intelligenz 28. – 30. Oktober 2019 in Berlin |
Publisher: | VDE Verlag |
Place of publication: | Berlin |
Document Type: | Conference Proceeding |
Language: | German |
Year of Completion: | 2019 |
Release Date: | 2019/12/12 |
First Page: | 464 |
Last Page: | 467 |
Open-Access-Status: | Closed Access |
Licence (German): | Urheberrechtlich geschützt |