• search hit 2 of 3
Back to Result List

High voltage insulation properties of DLC-Parylene multilayer films for microsurgery instruments

Export metadata

Additional Services

Share in Twitter Search Google Scholar
Metadaten
Author:Michael Banghard, Romy Hartmann, Kamel Silmy, Wilfried Nisch, Rene P. von Metzen, Alfred Stett, Volker Bucher
DOI:https://doi.org/10.1016/j.mee.2016.03.057
ISSN:0167-9317
Parent Title (English):Microelectronic Engineering
Document Type:Article (peer-reviewed)
Language:English
Year of Completion:2016
Release Date:2017/04/24
Tag:Biocompatible and reprocessable; DLC PECVD; High voltage insulation layers; Layers; Medical devices; Minimal invasive surgery; Parylene
Volume:153.2016
First Page:126
Last Page:131
Open Access:Innerhalb der Hochschule
Licence (German):License LogoEs gilt das UrhG