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Investigation of plastic electrode tools for electrochemical machining of silicon
Author: | Victor V. Lyubimov, Vladimir M. Volgin, Ulrich MeschederORCiDGND, Inna V. Gnidina, Alexey Ivanov |
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DOI: | https://doi.org/10.1016/j.precisioneng.2016.09.017 |
ISSN: | 1873-2372 |
Parent Title (English): | Precision Engineering |
Document Type: | Article (peer-reviewed) |
Language: | English |
Year of Completion: | 2016 |
Release Date: | 2017/04/26 |
Tag: | Metal coating; Micro electrochemical machining; Plastic electrode-tool; Silicon |
Volume: | 47.2016 |
First Page: | 546 |
Last Page: | 556 |
Open-Access-Status: | Closed Access |
Licence (German): | Urheberrechtlich geschützt |