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MOEMS based concept for miniaturized monochromators, spectrometers and tunable light sources

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Author:Ulrich MeschederORCiDGND, Isman KhaziORCiD, Andras Kovacs, Alexey Ivanov
Parent Title (English):1. Baden-W├╝rttemberg Center of Applied Research Symposium on Information and Communication Systems: SInCom 2014; 12. December 2014 in Furtwangen
Document Type:Conference Proceeding
Year of Completion:2014
Release Date:2018/01/25
Tag:Biosensor; Dual tunability; MEMS; MOEMS; Monochromator; Photonic crystals; Porous silicon; Silicon anodization; Spectrometer; Tunable optical filter
First Page:38
Last Page:43
Open Access:Frei verf├╝gbar
Licence (German):License LogoEs gilt das UrhG