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MOEMS based concept for miniaturized monochromators, spectrometers and tunable light sources

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Author:Ulrich MeschederORCiDGND, Isman M. KhaziORCiDGND, Andras KovacsORCiDGND, Alexey Ivanov
URL:https://opus.hs-offenburg.de/frontdoor/deliver/index/docId/1782/file/proceedingsSInCom2014.pdf
ISBN:978-3-00-048182-6
Parent Title (English):1. Baden-Württemberg Center of Applied Research Symposium on Information and Communication Systems: SInCom 2014; 12. December 2014 in Furtwangen
Document Type:Conference Proceeding
Language:English
Year of Completion:2014
Release Date:2018/01/25
Tag:Biosensor; Dual tunability; MEMS; MOEMS; Monochromator; Photonic crystals; Porous silicon; Silicon anodization; Spectrometer; Tunable optical filter
Page Number:6
First Page:38
Last Page:43
Open-Access-Status: Open Access 
Licence (German):License LogoUrheberrechtlich geschützt