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In-situ monitoring of electron beam induced deposition by atomic force microscopy in a scanning electron microscope

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Author:S. Bauerdick, Claus J. Burkhardt, R. Rudorf, W. Barth, Volker Bucher, Wilfried Nisch
DOI:https://doi.org/10.1016/S0167-9317(03)00160-6
ISSN:0167-9317
Parent Title (English):Microelectronic Engineering
Document Type:Article (peer-reviewed)
Language:English
Year of Completion:2003
Release Date:2017/06/28
Tag:Atomic force microscope; Electron beam induced deposition; In-situ monitoring; Local gas injection; Micro manipulator
Volume:67/68.2003
Issue:June
First Page:963
Last Page:969
Open Access:Innerhalb der Hochschule
Licence (German):License LogoEs gilt das UrhG