Formation of arbitrarily shaped 3D-forms in silicon by electrochemical wet-etching

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Author:Alexej Ivanov, Ulrich MeschederORCiDGND, Peter Woias, Michael Kröner
Parent Title (German):Forschungsbericht
Document Type:Report
Opac ID:Im Katalog der Hochschule Furtwangen ansehen
Year of Completion:2009
Release Date:2018/09/25
First Page:34
Last Page:38
Open Access:Frei verfügbar
Project report:Forschungsbericht 2008/2009
Licence (German):License LogoEs gilt das UrhG