TY  - RPRT
U1  - Forschungsbericht
A1  - Ivanov, Alexey
A1  - Mescheder, Ulrich
A1  - Woias, Peter
A1  - Kröner, Michael
T1  - Formation of arbitrarily shaped 3D-forms in silicon by electrochemical wet-etching
T2  - Forschungsbericht
Y2  - 2009
SP  - 34
EP  - 38
ER  -