Simulation supported design of micromechanical sensors

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Author:S. Majer, Ulrich MeschederORCiDGND
Parent Title (English):Simulation and design of microsystems and microstructures : [papers presented at the First International Conference on the Simulation and Design of Microsystems and Microstructures, which was held in Southampton, UK, in September 1995
Publisher:Computational Mechanics Publ.
Place of publication:Southampton
Document Type:Conference Proceeding
Year of Completion:1995
Release Date:2018/03/01
First Page:329
Last Page:337
Open Access:Frei verf├╝gbar
Licence (German):License LogoEs gilt das UrhG