@inproceedings{MajerMescheder1995, author = {S. Majer and Ulrich Mescheder}, title = {Simulation supported design of micromechanical sensors}, series = {Simulation and design of microsystems and microstructures : [papers presented at the First International Conference on the Simulation and Design of Microsystems and Microstructures, which was held in Southampton, UK, in September 1995}, publisher = {Computational Mechanics Publ.}, address = {Southampton}, isbn = {1-85312-390-0}, pages = {329 -- 337}, year = {1995}, language = {en} }