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Author
Buchmann, L.-M.
(1)
Mescheder, Ulrich
(1)
Torkler, M.
(1)
Year of publication
1991
(1)
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Article (peer-reviewed)
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English
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Characterization of silicon open stencil masks in an ion projection lithography machine
(1991)
Buchmann, L.-M.
;
Mescheder, Ulrich
;
Torkler, M.
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1