Deutsch
Login
Open Access
Home
Search
Browse
Publish
FAQ
Volltext-Downloads (blau) und Frontdoor-Views (grau)
Schließen
Author(s)
All words
At least one word
None of the words
Title
All words
At least one word
None of the words
Additional Person(s)
All words
At least one word
None of the words
Referee(s)
All words
At least one word
None of the words
Abstract
All words
At least one word
None of the words
Fulltext
All words
None of the words
Refine
Author
Mescheder, Ulrich (15)
(remove)
Year of publication
2007
(3)
2011
(2)
2002
(1)
2003
(1)
2006
(1)
2008
(1)
2009
(1)
2010
(1)
2012
(1)
2013
(1)
+ more
Document type
Conference Proceeding
(8)
Article (peer-reviewed)
(5)
Contribution to a Periodical
(1)
Report
(1)
Language
English (15)
(remove)
Has full text
No
(15)
Is part of the Bibliography
Yes
(15)
Keywords
Porous silicon
(2)
Adhesion and diffusion barrier
(1)
Charge decay
(1)
Charge stability
(1)
Effective heating
(1)
Electrets charging
(1)
Electrochemical etching process
(1)
Electrostatic vibration energy harvester
(1)
Humidity sensor
(1)
Ion implantation
(1)
+ more
15
search hits
4
to
4
Export
BibTeX
CSV
RIS
1
10
20
50
100
Development of a focusing micromirror device with an in-plane stress relief structure in silicon-on-insulator technology
(2014)
Kronast, Wolfgang
;
Mescheder, Ulrich
;
Müller, Bernhard
;
Huster, Rolf
4
to
4