Refine
Document type
- Article (peer-reviewed) (2) (remove)
Language
- English (2)
Has full text
- No (2)
Is part of the Bibliography
- Yes (2)
Keywords
- Inclinometers (1)
- Micromechanics (1)
- Piezoresistance (1)
- Silicon (1)
Micromechanical inclinometer
(1997)