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Author
Keshavarzi, Shervin
(2)
Mescheder, Ulrich
(2)
Reinecke, Holger
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Year of publication
2014
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2015
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Conference Proceeding
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English
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Characterisation and simulation of low temperature Si-Si direct bonding through velcro-like surfaces based on porous silicon
(2014)
Keshavarzi, Shervin
;
Mescheder, Ulrich
;
Reinecke, Holger
1
to
1