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Author
Schmid, Marvin (3)
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Year of publication
2022
(2)
2023
(1)
Document type
Article (peer-reviewed)
(2)
Conference Proceeding
(1)
Language
English
(3)
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Is part of the Bibliography
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(1)
Keywords
ALD
(1)
Encapsulation
(1)
Fluorocarbon
(1)
HFC
(1)
Hybrid Layers
(1)
PCB
(1)
Parylene
(1)
Plasma etching
(1)
Printed circuit board
(1)
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Novel method for plasma etching of printed circuit boards as alternative for fluorocarbon gases
(2023)
Kintzel, Wolfram
;
Schmid, Marvin
;
Rentschler, Achim
;
Eisenlohr, Jörg
;
Bucher, Volker
1
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1