Microfabrication of 3D Free-Forms with Textured Surface Morphology in Monocrystalline Silicon using Grayscale Technology
| Author: | Isman M. KhaziORCiDGND, Andras KovacsORCiDGND, Ulrich MeschederORCiDGND |
|---|---|
| DOI: | https://doi.org/10.33140/JAMSER.04.04.04 |
| ISSN: | 2689-1204 |
| Parent Title (English): | Journal of Applied Material Science & Engineering Research |
| Document Type: | Article (peer-reviewed) |
| Language: | English |
| Year of Completion: | 2020 |
| Release Date: | 2020/11/19 |
| Tag: | 3D free-forms; Direct writing laser; Gray scale technology; Grayscale lithography; Reactive ion etching |
| Volume: | 4.2020 |
| Issue: | 4 |
| First Page: | 150 |
| Last Page: | 154 |
| Open-Access-Status: | Open Access |
| Licence (German): |  Creative Commons - CC BY - Namensnennung 4.0 International |