Passivated electrode side walls by atomic layer deposition on flexible polyimide based samples
| Author: | Markus Westerhausen, Tanja Martin, Michael Metzger, Felix BlendingerORCiDGND, Monika Fleischer, Boris Hofmann, Volker BucherORCiDGND |
|---|---|
| DOI: | https://doi.org/10.1016/j.mee.2020.111315 |
| ISSN: | 0167-9317 |
| Parent Title (English): | Microelectronic Engineering |
| Document Type: | Article (peer-reviewed) |
| Language: | English |
| Year of Completion: | 2020 |
| Release Date: | 2020/04/17 |
| Tag: | Atomic layer deposition (ALD); Flexible microelectrode arrays (Flex-MEAs); Passivation; Polyimide |
| Volume: | 227.2020 |
| Issue: | April Artikel 111315 |
| Licence (German): |  Urheberrechtlich geschützt |