Silicon Needle-like Surfaces for Room Temperature Silicon-Silicon Bonding Applications
| Document Type: | Doctoral Thesis |
|---|---|
| Author: | Shervin KeshavarziORCiDGND |
| URN: | https://urn:nbn:de:bsz:25-freidok-1515955 |
| Referee: | Holger Reinecke, Ulrich MeschederORCiDGND |
| Language: | English |
| Year of Completion: | 2019 |
| University: | Albert-Ludwigs-Universität |
| City of university: | Freiburg |
| Date of final exam: | 2019/12/05 |
| Release Date: | 2019/12/20 |
| Page Number: | 220 |
| Open-Access-Status: | Open Access |
| Licence (German): |  Urheberrechtlich geschützt |