Fabrication of 3D microstructures using grayscale lithography
| Document Type: | Article (peer-reviewed) |
|---|---|
| Author: | Frederico Lima, Isman M. KhaziORCiDGND, Ulrich MeschederORCiDGND, Alok C. Tungal, Uma Muthiah |
| DOI: | https://doi.org/10.1515/aot-2019-0023 |
| ISSN: | 2192-8584 |
| Parent Title (English): | Advanced Optical Technologies |
| Language: | English |
| Year of Completion: | 2019 |
| Release Date: | 2019/06/21 |
| Tag: | 3D structuring; Grayscale lithography; Grayscale technology; Laser direct writing; Microelectroplating; Photoresist mold; Reactive ion etching |
| Volume: | 8.2019 |
| Issue: | 3-4 |
| First Page: | 181 |
| Last Page: | 193 |
| Licence (German): |  Urheberrechtlich geschützt |