Volltext-Downloads (blau) und Frontdoor-Views (grau)

3D free forms in c-Si via grayscale lithography and RIE

Export metadata

Additional Services

Search Google Scholar

Statistics

frontdoor_oas
Metadaten
Author:Isman M. KhaziORCiDGND, Ulrich MeschederORCiDGND, Uma Muthiah
DOI:https://doi.org/10.1016/j.mee.2018.02.006
ISSN:0167-9317
Parent Title (English):Microelectronic Engineering
Document Type:Article (peer-reviewed)
Language:English
Year of Completion:2018
Release Date:2018/02/23
Volume:193.2018
Issue:June
First Page:34
Last Page:40
Licence (German):License LogoUrheberrechtlich gesch├╝tzt