3D free forms in c-Si via grayscale lithography and RIE

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Author:Isman KhaziORCiD, Ulrich MeschederGND, Uma Muthiah
DOI:https://doi.org/10.1016/j.mee.2018.02.006
ISSN:0167-9317
Parent Title (English):Microelectronic Engineering
Document Type:Article (peer-reviewed)
Language:English
Year of Completion:2018
Release Date:2018/02/23
Volume:193.2018
Issue:June
First Page:34
Last Page:40
Access Rights:Innerhalb der Hochschule
Licence (German):License LogoEs gilt das UrhG