3D free forms in c-Si via grayscale lithography and RIE
| Author: | Isman M. KhaziORCiDGND, Ulrich MeschederORCiDGND, Uma Muthiah |
|---|---|
| DOI: | https://doi.org/10.1016/j.mee.2018.02.006 |
| ISSN: | 0167-9317 |
| Parent Title (English): | Microelectronic Engineering |
| Document Type: | Article (peer-reviewed) |
| Language: | English |
| Year of Completion: | 2018 |
| Release Date: | 2018/02/23 |
| Volume: | 193.2018 |
| Issue: | June |
| First Page: | 34 |
| Last Page: | 40 |
| Licence (German): |  Urheberrechtlich geschützt |