Photometric device for control of micromechanical elements manufacturing

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Metadaten
Author:E. A. Kolgin, I. A. Tumanov, A. A. Ukhov, Ulrich MeschederORCiDGND
Parent Title (English):Proceedings of third international scientific technical Conference of Actual Problems of electronic instrument engineering, APEIE-96, Vol. 2
Document Type:Conference Proceeding
Language:English
Year of Completion:1996
Release Date:2018/03/01
Tag:Mikrofiche
First Page:75
Last Page:76
Note:
in kyrillischer Schrift
Access Rights:Frei verf├╝gbar
Licence (German):License LogoEs gilt das UrhG