Photometric device for control of micromechanical elements manufacturing
| Author: | E. A. Kolgin, I. A. Tumanov, A. A. Ukhov, Ulrich MeschederORCiDGND |
|---|---|
| Parent Title (English): | Proceedings of third international scientific technical Conference of Actual Problems of electronic instrument engineering, APEIE-96, Vol. 2 |
| Document Type: | Conference Proceeding |
| Language: | English |
| Year of Completion: | 1996 |
| Release Date: | 2018/03/01 |
| Tag: | Mikrofiche |
| First Page: | 75 |
| Last Page: | 76 |
| Note: | in kyrillischer Schrift |
| Licence (German): |  Urheberrechtlich geschützt |