Formation of Arbitrarily Shaped 3D-Forms in Silicon by 315 Electrochemical Wet-Etching

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Metadaten
Author:Alexey Ivanov, Ulrich MeschederGND, M. Kröner, Peter Woias
ISBN:978-3-00-025529-8
Parent Title (English):Technical digest / MME 2008, 19th MicroMechanics Europe Workshop, September 28 - 30, 2008, Aachen, Germany
Document Type:Conference Proceeding
Language:English
Year of Completion:2008
Release Date:2018/02/19
Pagenumber:3
First Page:315
Last Page:318
Access Rights:Frei verfügbar
Licence (German):License LogoEs gilt das UrhG