Formation of Arbitrarily Shaped 3D-Forms in Silicon by 315 Electrochemical Wet-Etching
| Document Type: | Conference Proceeding |
|---|---|
| Author: | Alexey Ivanov, Ulrich MeschederORCiDGND, M. Kröner, Peter Woias |
| ISBN: | 978-3-00-025529-8 |
| Parent Title (English): | Technical digest / MME 2008, 19th MicroMechanics Europe Workshop, September 28 - 30, 2008, Aachen, Germany |
| Language: | English |
| Year of Completion: | 2008 |
| Release Date: | 2018/02/19 |
| Page Number: | 3 |
| First Page: | 315 |
| Last Page: | 318 |
| Licence (German): |  Urheberrechtlich geschützt |