Developement of stress relief suspensions for micro-machined silicon membranes
| Author: | Wolfgang Kronast, Ulrich MeschederORCiDGND, Bernhard Müller |
|---|---|
| URL: | https://www.comsol.com/paper/development-of-stress-relief-suspensions-for-micro-machined-silicon-membranes-15193 |
| Parent Title (German): | COMSOL Conference 2013, 23–25 October 2013, Rotterdam, Netherlands |
| Document Type: | Conference Proceeding |
| Language: | German |
| Year of Completion: | 2013 |
| Release Date: | 2018/01/25 |
| Open-Access-Status: | Open Access |
| Licence (German): |  Urheberrechtlich geschützt |