Developement of stress relief suspensions for micro-machined silicon membranes

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Author:Wolfgang Kronast, Ulrich MeschederGND, Bernhard Müller
URL:https://www.comsol.com/paper/development-of-stress-relief-suspensions-for-micro-machined-silicon-membranes-15193
Parent Title (German):COMSOL Conference 2013, 23–25 October 2013, Rotterdam, Netherlands
Document Type:Conference Proceeding
Language:German
Year of Completion:2013
Release Date:2018/01/25
Access Rights:Frei verfügbar
Licence (German):License LogoEs gilt das UrhG