Surface polishing of rough (110) silicon plane by HNA etching resulting from wet anisotropic KOH etching
Author: | Isman M. KhaziORCiDGND, Ulrich MeschederORCiDGND |
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ISBN: | 978-3-8007-4100-7 |
Parent Title (English): | MEMS, Mikroelektronik, Systeme : proceedings ; MikroSystemTechnik Kongress 2015, 26.-28. Oktober 2015 in Karlsruhe |
Publisher: | VDE-Verlag |
Place of publication: | Berlin |
Document Type: | Conference Proceeding |
Language: | English |
Year of Completion: | 2015 |
Release Date: | 2016/12/14 |
Tag: | CD-ROM |
First Page: | 417 |
Last Page: | 420 |
Licence (German): | ![]() |