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Surface Micromachining Process for C-Si as Active Material

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Author:Andras Kovacs, Ulrich MeschederORCiDGND
Parent Title (English):Transducers '01 Eurosensors XV : digest of technical papers / the 11th International Conference on Solid-State Sensors and Actuators, June 10-14, 2001, Munich, Germany
Place of publication:Berlin
Document Type:Conference Proceeding
Year of Completion:2001
Release Date:2018/02/27
Tag:Porous silicon; Sacrificial layer; Surface micromachining
First Page:620
Last Page:623
Open Access:Frei verf├╝gbar
Licence (German):License LogoEs gilt das UrhG