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Large Defection Analysis of Perforated Silicon Nitride Membranes

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Author:Adam Kovacs, Zsolt Vizvary, Andras Kovacs, Ulrich MeschederORCiDGND
Parent Title (English):6th European Solid Mechanics Conference: ESMC 2006; 28 August – 1 September, 2006 Budapest, Hungary
Document Type:Conference Proceeding
Year of Completion:2006
Release Date:2018/02/21
Tag:Finite elements; Membrane deflection; Perforated silicon nitride
Open Access:Frei verfügbar
Licence (German):License LogoEs gilt das UrhG