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Design Consideration and Realization of a Novel Micromechanical Bi-Stable Switch

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Author:Markus Freudenreich, Ulrich MeschederORCiDGND, Gergoe Somogyi
Parent Title (English):Transducers '03: The 12th International Conference on Solid-State Sensors, Actuators and Microsystems; Digest of Technical Papers, Volume 2
Document Type:Conference Proceeding
Year of Completion:2003
Release Date:2018/02/23
First Page:1096
Last Page:1099
Open Access:Frei verf├╝gbar
Licence (German):License LogoEs gilt das UrhG