Novel method for plasma etching of printed circuit boards as alternative for fluorocarbon gases
Author: | Wolfram KintzelGND, Marvin Schmid, Achim Rentschler, Jörg Eisenlohr, Volker BucherORCiDGND |
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DOI: | https://doi.org/10.34343/ijpest.2023.17.e02002 |
ISSN: | 2435-0125 |
Parent Title (English): | International Journal of Plasma Environmental Science and Technology : ISNTPT |
Document Type: | Article (peer-reviewed) |
Language: | English |
Year of Completion: | 2023 |
Release Date: | 2023/06/23 |
Tag: | Fluorocarbon; HFC; PCB; Plasma etching; Printed circuit board |
Volume: | 17.2023 |
Issue: | 2 |
Article Number: | e02002 |
Page Number: | 19 |
Open-Access-Status: | Open Access |
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Licence (German): | Urheberrechtlich geschützt |