• search hit 1 of 1
Back to Result List

Large Defection Analysis of Perforated Silicon Nitride Membranes

Export metadata

Additional Services

Share in Twitter Search Google Scholar
Author:Adam Kovacs, Zsolt Vizvary, Andras Kovacs, Ulrich MeschederORCiDGND
Parent Title (English):6th European Solid Mechanics Conference: ESMC 2006; 28 August – 1 September, 2006 Budapest, Hungary
Document Type:Conference Proceeding
Year of Completion:2006
Release Date:2018/02/21
Tag:Finite elements; Membrane deflection; Perforated silicon nitride
Licence (German):License LogoEs gilt das UrhG