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Author
Mescheder, Ulrich
(2)
Betz, H.
(1)
Huber, H.-L.
(1)
Lüthje, H.
(1)
Mackens, U.
(1)
Matthießen, B.
(1)
Pongratz, S.
(1)
Rohrmoser, W.
(1)
Windbracke, W.
(1)
Year of publication
1986 (2)
(remove)
Document type
Article (peer-reviewed)
(2)
Language
English
(2)
Has full text
No
(2)
Is part of the Bibliography
Yes
(2)
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Title
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Author
Silicon X-ray masks: Pattern placement and overlay accuracy
(1986)
Betz, H.
;
Huber, H.-L.
;
Pongratz, S.
;
Rohrmoser, W.
;
Windbracke, W.
;
Mescheder, Ulrich
Stability of SiC-masks for high resolution synchrotron X-ray lithography
(1986)
Lüthje, H.
;
Mackens, U.
;
Mescheder, Ulrich
;
Matthießen, B.
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2