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Author
Müller, Bernhard (2)
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Year of publication
2003
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2007
(1)
Document type
Article (peer-reviewed) (2)
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English
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Porous silicon (2)
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Porous silicon-based humidity sensor with interdigital electrodes and internal heaters
(2003)
Fürjes, P.
;
Kovacs, Andras
;
Dücsö, Cs.
;
Adam, Maria
;
Müller, Bernhard
;
Mescheder, Ulrich
Optimization of platinum adhesion in electrochemical etching process for multi-sensor systems
(2007)
Kritwattanakhorn, Jutaphorn
;
Bauersfeld, Marie-Luise
;
Kovacs, Andras
;
Müller, Bernhard
;
Mescheder, Ulrich
;
Rademacher, Sven
;
Wöllenstein, Jürgen
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