Refine
Year of publication
- 2015 (18)
- 2019 (16)
- 2009 (15)
- 2013 (15)
- 2005 (12)
- 2021 (12)
- 2023 (12)
- 2007 (11)
- 2014 (11)
- 2011 (10)
- 2018 (10)
- 2012 (9)
- 2016 (9)
- 2000 (8)
- 2002 (8)
- 2010 (8)
- 2020 (8)
- 2004 (7)
- 2006 (7)
- 2017 (7)
- 1989 (5)
- 1998 (5)
- 2001 (5)
- 2003 (4)
- 2008 (4)
- 1990 (3)
- 1995 (3)
- 1996 (3)
- 2022 (3)
- 1986 (2)
- 1988 (2)
- 1991 (2)
- 1984 (1)
- 1985 (1)
- 1987 (1)
- 1997 (1)
- 1999 (1)
Document type
- Conference Proceeding (130)
- Article (peer-reviewed) (66)
- Report (34)
- Contribution to a Periodical (13)
- Other (9)
- Part of a Book (5)
- Book (2)
Language
- English (165)
- German (93)
- Multiple languages (1)
Keywords
- CD-ROM (28)
- Porous silicon (15)
- Poster (11)
- Patent (9)
- MEMS (6)
- MOEMS (6)
- Silicon (5)
- FEM simulation (3)
- Needles (3)
- Photonic crystal (3)