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Author
Müller, Bernhard (6)
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Year of publication
2007
(3)
2002
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2003
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2006
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Conference Proceeding
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Article (peer-reviewed)
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English (6)
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Porous silicon
(2)
Adhesion and diffusion barrier
(1)
Effective heating
(1)
Electrochemical etching process
(1)
Humidity sensor
(1)
Multifunctional sensor systems
(1)
Platinum
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Optimization of platinum adhesion in electrochemical etching process for multi-sensor systems
(2006)
Kritwattanakhorn, Jutaphorn
;
Kovacs, Andras
;
Mescheder, Ulrich
;
Müller, Bernhard
;
Bauersfeld, Marie-Luise
;
Rademacher, Sven
;
Wöllenstein, Jürgen
MEMS-Based Air Quality Sensor
(2007)
Mescheder, Ulrich
;
Bauersfeld, Marie-Luise
;
Kovacs, Andras
;
Kritwattanakhorn, Jutaphorn
;
Müller, Bernhard
;
Peter, Andreas
;
Ament, Christoph
;
Rademacher, Sven
;
Wöllenstein, Jürgen
Optimization of platinum adhesion in electrochemical etching process for multi-sensor systems
(2007)
Kritwattanakhorn, Jutaphorn
;
Bauersfeld, Marie-Luise
;
Kovacs, Andras
;
Müller, Bernhard
;
Mescheder, Ulrich
;
Rademacher, Sven
;
Wöllenstein, Jürgen
Sensor system for air quality measurement
(2007)
Kovacs, Andras
;
Müller, Bernhard
;
Kritwattanakhorn, Jutaphorn
;
Mescheder, Ulrich
;
Peter, Andreas
;
Ament, Christoph
;
Wöllenstein, Jürgen
;
Bauersfeld, Marie-Luise
;
Rademacher, Sven
Porous silicon-based humidity sensor with interdigital electrodes and internal heaters
(2003)
Fürjes, P.
;
Kovacs, Andras
;
Dücsö, Cs.
;
Adam, Maria
;
Müller, Bernhard
;
Mescheder, Ulrich
Sensorik: Porous Silicon Based Humidity Sensor with Interdigital Electrodes and Internal Heaters
(2002)
Mescheder, Ulrich
;
Kovacs, Andras
;
Müller, Bernhard
1
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6