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Author
Kovacs, Andras
(6)
Mescheder, Ulrich
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Filbert, Alexander
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Huster, Rolf
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Ivanov, Alexey
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Jonnalagadda, Prasad
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Kronast, Wolfgang
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Schneider, Roland
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Contribution to a Periodical (6)
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Electrochemical etching
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Local backside contacts
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Optical multilayer
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Optoelectronic and photonic sensors
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Porous silicon
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Refractive index
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Secondary current distribution
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Silicon anodization
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Structuring
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3-D Micro Free-Form Manufacturing in Silicon: Micro Free- Form Production for Plastics Moulding Technology
(2006)
Huster, Rolf
;
Kovacs, Andras
;
Mescheder, Ulrich
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