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Sensorik: Porous Silicon Based Humidity Sensor with Interdigital Electrodes and Internal Heaters
(2002)
Skalierbare Verbindungstechnik mittels anpassbarer nanoskaliger Verbindungsstrukturen (NanoBond)
(2009)
Optimization of platinum adhesion in electrochemical etching process for multi-sensor systems
(2006)
Optimization of platinum adhesion in electrochemical etching process for multi-sensor systems
(2007)
Realization and mechanical investigation of perforated and porous membranes for filter applications
(2006)
Transport mechanisms in nanostructured porous silicon layers for sensor and filter applications
(2012)
Steuerung der Peaklage und der Sensitivität von siliziumbasierten porösen optischen Multischichten
(2013)