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Oberflächenstabilisierung nanostrukturierter poröser Siliziumschichten für sensorische Anwendungen
(2012)
Optimization of Microfabricated 2D Planar Spiral Microcoils for the Micro NDT of Grinding Burn
(2020)
Optimization of platinum adhesion in electrochemical etching process for multi-sensor systems
(2006)