Refine
Year of publication
Document type
- Conference Proceeding (48)
- Article (peer-reviewed) (16)
- Report (12)
- Contribution to a Periodical (6)
- Other (4)
- Part of a Book (2)
Keywords
- CD-ROM (13)
- Porous silicon (11)
- Patent (4)
- Poster (4)
- MEMS (3)
- MOEMS (3)
- Photonic crystal (3)
- Silicon anodization (3)
- Biosensor (2)
- Dual tunability (2)
Steuerung der Peaklage und der Sensitivität von siliziumbasierten porösen optischen Multischichten
(2013)
Transport mechanisms in nanostructured porous silicon layers for sensor and filter applications
(2012)
Oberflächenstabilisierung nanostrukturierter poröser Siliziumschichten für sensorische Anwendungen
(2012)
Skalierbare Verbindungstechnik mittels anpassbarer nanoskaliger Verbindungsstrukturen (NanoBond)
(2009)
Optimization of platinum adhesion in electrochemical etching process for multi-sensor systems
(2007)
Mechanical investigation of perforated and porous membranes for micro- and nanofilter applications
(2007)
Optimization of platinum adhesion in electrochemical etching process for multi-sensor systems
(2006)
Realization and mechanical investigation of perforated and porous membranes for filter applications
(2006)