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Optimization of platinum adhesion in electrochemical etching process for multi-sensor systems
(2006)
Optische Charakterisierung von Stress-relaxierten aktiven MOEMS-Membranspiegeln mit großer Apertur
(2015)
Steuerung der Peaklage und der Sensitivität von siliziumbasierten porösen optischen Multischichten
(2013)
Transport mechanisms in nanostructured porous silicon layers for sensor and filter applications
(2012)
Oberflächenstabilisierung nanostrukturierter poröser Siliziumschichten für sensorische Anwendungen
(2012)
Optimization of platinum adhesion in electrochemical etching process for multi-sensor systems
(2007)
Mechanical investigation of perforated and porous membranes for micro- and nanofilter applications
(2007)