Refine
Year of publication
Document type
- Conference Proceeding (116)
- Article (peer-reviewed) (54)
- Report (33)
- Contribution to a Periodical (13)
- Other (9)
- Part of a Book (5)
- Book (2)
Language
- English (139)
- German (92)
- Multiple languages (1)
Keywords
- CD-ROM (28)
- Porous silicon (15)
- Patent Specifications (9)
- MEMS (5)
- MOEMS (5)
- Silicon (5)
- Poster (4)
- FEM simulation (3)
- Needles (3)
- Photonic crystal (3)
Bewegungsgeber
(2001)